JPH0132738Y2 - - Google Patents
Info
- Publication number
- JPH0132738Y2 JPH0132738Y2 JP3511785U JP3511785U JPH0132738Y2 JP H0132738 Y2 JPH0132738 Y2 JP H0132738Y2 JP 3511785 U JP3511785 U JP 3511785U JP 3511785 U JP3511785 U JP 3511785U JP H0132738 Y2 JPH0132738 Y2 JP H0132738Y2
- Authority
- JP
- Japan
- Prior art keywords
- mask
- base plate
- wafer
- movable base
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000003825 pressing Methods 0.000 claims description 14
- 238000001514 detection method Methods 0.000 claims description 8
- 230000006835 compression Effects 0.000 description 7
- 238000007906 compression Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3511785U JPH0132738Y2 (en]) | 1985-03-11 | 1985-03-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3511785U JPH0132738Y2 (en]) | 1985-03-11 | 1985-03-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61151334U JPS61151334U (en]) | 1986-09-18 |
| JPH0132738Y2 true JPH0132738Y2 (en]) | 1989-10-05 |
Family
ID=30539104
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3511785U Expired JPH0132738Y2 (en]) | 1985-03-11 | 1985-03-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0132738Y2 (en]) |
-
1985
- 1985-03-11 JP JP3511785U patent/JPH0132738Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61151334U (en]) | 1986-09-18 |
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